Patents
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Basic information
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| Name | NAKAHIRA Kenji |
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| researchmap researcher code | 7000019192 |
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Patent Right
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欠陥観察方法及び欠陥観察装置
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嶺川陽平, 中平健治, 原田実, 平井大博, 中垣亮
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特許第05544344号
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2014/05
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