High-Rate Deposition of YBa2Cu3O7-d High-Temperature Superconducting Films by IR-Laser-Assisted Chemical Vapor Deposition
S. Miyata, K. Matsuse, A. Ibi, T. Izumi, Y. Shiohara, and T. Goto
Supercond. Sci. Technol.
26
045020
10.1088/0953-2048/26/4/045020