Academic Thesis
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Basic information
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| Name | TANIZAWA Ken |
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| researchmap researcher code | B000266677 |
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Evaluation of the phase error in Si-wire arrayed-waveguide gratings fabricated by ArF-immersion photolithography
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Joint Author
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Kyosuke Muramastu, Hideaki Asakura, Keijiro, Suzuki, Ken Tanizawa, Munehiro Toyama, Minoru Ohtsuka, Nobuyuki Yokoyama, Kazuyuki Matsumaro, Miyoshi Seki, Keiji Koshino, Kazuhiro Ikeda, Shu Namiki, Hitoshi Kawashima, and Hiroyuki Tsuda
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IEICE Electronics Express
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IEICE
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12
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7
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20150019
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2015/04
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Exist
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Not exist
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English
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Research papers (academic journals)
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International
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