Conference
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Basic information
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| Name | KIMURA Hitoshi |
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Reverse Engineering of MEMS Devices using High Precision X-ray CT (Proposal of the image reconstruction algorithm for eliminating the metal artifacts)
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Michihiko Koseki, Shinpei Sato, Hitoshi Kimura, Norio Inou
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2006年度精密工学会春季大会学術講演会
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2006/03/15
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