Academic Thesis
|
|
Basic information
|
| Name | KIMURA Hitoshi |
| Belonging department | |
| Occupation name | |
| researchmap researcher code | |
| researchmap agency |
 |
Development of MEMS Vibrating Sensor with Phase-Shifted Optical Pulse Interferometry
|
|
Yusaku Ohe, Hitoshi Kimura, Norio Inou, Yoshiharu Hirayama and Minoru Yoshida
|
|
|
2017 IEEE, Electron Devices Technology and Manufacturing Conf. (EDTM)
|
|
|
|
145
|
～
|
147
|
2017/03/02
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|